Vapor sorption-based critical dimension metrology for uniaxial anisotropic nanopatterns

Journal:

Applied Physics Letters

Published:

2026-04-20

DOI:

10.1063/5.0320423

Affiliations:

5

Authors:

8

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Institutions	Authors	Share
Semilab Inc., Hungary	6.500000	0.81
Budapest University of Technology and Economics (BME), Hungary	0.500000	0.06
Friedrich Schiller University Jena (FSU), Germany	0.333333	0.04
Fraunhofer Institute for Applied Optics and Precision Engineering (IOF), Germany	0.333333	0.04
Jena University of Applied Sciences (EAH Jena), Germany	0.333333	0.04

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