Spectroscopic imaging ellipsometry for spatially resolved mapping of layer-by-layer oxidation in WSe2

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0320605
Affiliations:
5
Authors:
9
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Institutions Authors Share
University of Cambridge, United Kingdom (UK)
5.500000
 0.61
National Cheng Kung University (NCKU), Taiwan
3.000000
 0.33
King Fahd University of Petroleum and Minerals (KFUPM), Saudi Arabia
0.500000
 0.06
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