UV ozone oxidized high-k TaOx dielectric with van der Waals interface for two-dimensional electronic devices

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0321761
Affiliations:
4
Authors:
11
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Institutions Authors Share
School of Integrated Circuits, NJU, China
5.000000
 0.45
School of Mechanical Engineering, SJTU, China
3.000000
 0.27
Suzhou University of Science and Technology, China
2.000000
 0.18
Nanjing Tech University (NanjingTech), China
1.000000
 0.09
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