Plasma oxidation-enhanced composite passivation for surface leakage reduction in InGaAsSb extended SWIR photodetectors

Journal:
Applied Physics Letters
Published:
Affiliations:
5
Authors:
13
Institutions Authors Share
State Key Laboratory of Optoelectronic Materials and Devices, IOS CAS, China
6.000000
0.46
University of Chinese Academy of Sciences (UCAS), China
4.500000
0.35
Harbin Institute of Technology (HIT), China
1.000000
0.08
National Key Laboratory of Special Rare Metal Materials, China
1.000000
0.08
Beijing University of Posts and Telecommunications (BUPT), China
0.500000
0.04