Spurious-free A1-mode Lamb wave resonator with crescent-shaped busbars and high FoM of 360

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0324262
Affiliations:
3
Authors:
12
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Institutions Authors Share
Nantong University (NTU), China
8.500000
 0.71
Shanghai Institute of Microsystem and Information Technology (SIMIT), CAS, China
2.500000
 0.21
CETC Deqing Huaying Electronics, China
1.000000
 0.08
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