Wafer-scale dry transfer of graphene via thermally removable Sb2O3 sacrificial layer

Journal:

Applied Physics Letters

Published:

2026-03-30

DOI:

10.1063/5.0324812

Affiliations:

3

Authors:

7

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Institutions	Authors	Share
State Key Laboratory of Materials for Integrated Circuits, SIMIT CAS, China	4.500000	0.64
Shanghai Institute of Microsystem and Information Technology (SIMIT), CAS, China	1.500000	0.21
University of Chinese Academy of Sciences (UCAS), China	1.000000	0.14

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