Molecular beam epitaxy of ferroelectric ScAlN on β-Ga2O3 substrates

Journal:
Applied Physics Letters
Published:
Affiliations:
6
Authors:
18
Institutions Authors Share
Peking University (PKU), China
5.666667
0.31
State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, PKU, China
5.333333
0.30
Beijing Information Science and Technology University (BISTU), China
5.000000
0.28
State Key Laboratory of Crystal Materials (SKLCM), China
1.000000
0.06
Suzhou Laboratory, China
1.000000
0.06