Bandwidth enhancement in hexagonal M-plane InGaN/GaN MQW micro-photodetectors via TMAH sidewall treatment

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0324924
Affiliations:
2
Authors:
12
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Institutions Authors Share
Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS, China
10.500000
10.500000
 0.88
University of Science and Technology of China (USTC), China
1.500000
 0.13
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