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Stress and doping analysis of low n-doped GaN layers on various substrates by micro-Raman mapping
Stress and doping analysis of low n-doped GaN layers on various substrates by micro-Raman mapping
Journal:
Applied Physics Letters
Published:
2026-03-23
DOI
:
10.1063/5.0325369
Affiliations:
6
Authors:
19
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Institutions
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CEA Laboratory of Electronics and Information Technology (LETI), France
6.000000
0.32
Laboratoire Ampère, France
4.000000
0.21
Centre de Recherche sur l'Hétéro-Epitaxie et ses Applications (CRHEA), France
3.000000
0.16
Institute of Electronics, Microelectronics and Nanotechnology (IEMN), France
3.000000
0.16
Lyon Nanotechnology Institute (INL), France
2.000000
0.11
Laboratoire Nanotechnologies Nanosystèmes (LN2), Canada
1.000000
0.05
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