Wafer scale characterization of bulk AlN substrates and homoepitaxial growth

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0325469
Affiliations:
4
Authors:
17
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Institutions Authors Share
USN Naval Research Laboratory (NRL), United States of America (USA)
12.000000
12.000000
 0.71
Crystal IS, Inc., United States of America (USA)
3.000000
 0.18
Agnitron Technology, Inc., United States of America (USA)
2.000000
 0.12
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