Surface morphology evolution in argon ion-beam polishing of barium titanate thin films

Journal:

Applied Physics Letters

Published:

2026-05-04

DOI:

10.1063/5.0325647

Affiliations:

2

Authors:

9

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Institutions	Authors	Share
Shanghai University (SHU), China	8.500000	0.94
State Key Laboratory of Transducer Technology, China	0.500000	0.06

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