Tracking visible pulsed laser annealing of Hf0.5Zr0.5O2 heterostructures with in situ transmission electron microscopy

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0326053
Affiliations:
1
Authors:
7
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Institutions Authors Share
National Institute of Scientific Research (INRS), Canada
7.000000
 1.00
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