Investigation on AZO/4H-SiC n-i-p ultraviolet photodiodes with high response via Al-composition engineering

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0326214
Affiliations:
2
Authors:
11
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Institutions Authors Share
Xiamen University (XMU), China
7.000000
 0.64
China Resources Microelectronics Limited, China
4.000000
 0.36