FM and double modulation interferometry with sub-nanometer resolution using the iLens technique
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0326925
- Affiliations:
- 2
- Authors:
- 3
| Institutions | Authors | Share |
|---|---|---|
| University of Bayreuth (UBT), Germany | 1.00 |