Hillock formation on high-temperature annealed AlN templates due to dislocation nucleation at AlON particles

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0329728
Affiliations:
2
Authors:
9
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Institutions Authors Share
Leibniz-Institut für Kristallzüchtung im Forschungsverbund Berlin e.V. (IKZ), Germany
6.000000
 0.67
Institute of High Pressure Physics (UNIPRESS), PAS, Poland
3.000000
 0.33
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