Uncooled infrared microbolometers with low thermal conductance based on shared leg

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0333981
Affiliations:
2
Authors:
4
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Institutions Authors Share
Peking University (PKU), China
3.000000
 0.75
Beijing Advanced Innovation Center for Integrated Circuits, China
1.000000
 0.25
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