Data-Driven Fault Detection for Wafer Scanner Cable Slabs using Koopman Operators

Journal:

IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)

Published:

2025-10-25

DOI:

10.1109/iros60139.2025.11247326

Affiliations:

7

Authors:

7

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Institutions	Authors	Share
University of Guelph, Canada	2.000000	0.29
Memorial University of Newfoundland (MUN), Canada	1.000000	0.14
Al-Zaytoonah University of Jordan (ZUJ), Jordan	1.000000	0.14
Jordan University of Science and Technology (JUST), Jordan	1.000000	0.14
Virginia Polytechnic Institute and State University (Virginia Tech), United States of America (USA)	1.000000	0.14
Sacred Heart University, United States of America (USA)	0.500000	0.07
Fraunhofer Institute for Applied Optics and Precision Engineering (IOF), Germany	0.500000	0.07

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