Reinforcement Learning-Based Scheduling for Dual-Arm Cluster Tool with Multifunctional Process Modules

Journal:
IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)
Published:
DOI:
10.1109/iros60139.2025.11247764
Affiliations:
1
Authors:
4
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Institutions Authors Share
Dongguan University of Technology (DGUT), China
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