Subangstrom ion beam engineering of buried ultrathin oxides for scalable quantum computing

Journal:: Science Advances
Published:: 2025-05-09
DOI:: 10.1126/sciadv.ads9744
Affiliations:: 3
Authors:: 22

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Institutions	Authors	Share
Bauman Moscow State Technical University (BMSTU), Russia	14.000000 14.000000	0.64
Federal State Unitary Enterprise Dukhov Automatics Research Institute (VNIIA), Russia	7.500000	0.34
Institute of Theoretical and Applied Electrodynamics, RAS, Russia	0.500000	0.02

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