Atomic Layer Deposition of Solid-State Electrolytes for Energy Storage

Atomic layer deposition (ALD) has emerged as a pivotal methodology for the fabrication of conformal, ultrathin films of solid-state electrolytes (SSEs) that are essential to the next generation of safe, high-energy-density batteries. By delivering monolayer precision in thickness and composition, ALD enables uniform coatings on complex three-dimensional electrode architectures, minimising interfacial resistance and mitigating dendrite formation. Recent progress has focused on lithium phosphorus oxynitride (LiPON) and related glassy electrolytes, as well as oxide and phosphate chemistries tailored for all-solid-state battery configurations. The slow diffusion of lithium ions across grain boundaries and through amorphous regions has driven innovations in precursor chemistry, process temperature optimisation and plasma-assisted routes to enhance ionic conductivity. Furthermore, ALD’s inherent scalability and compatibility with microfabrication techniques make it attractive for both miniature on-chip power sources and large-format energy storage modules. Interdisciplinary efforts now unite materials science, surface chemistry and electrochemical engineering to tackle remaining challenges in throughput, cost and long-term stability of ALD-derived SSEs.

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Atomic Layer Deposition of Solid-State Electrolytes for Energy Storage publication trend

The graph below shows the total number of articles in atomic layer deposition of solid-state electrolytes for energy storage across all publications each year (not limited to Nature Index journals).

Technical terms

Atomic layer deposition (ALD): A vapour-phase thin-film deposition technique offering self-limiting surface reactions that yield uniform monolayer growth with angstrom-level thickness control.

Solid-state electrolyte (SSE): A non-liquid ionic conductor, often ceramic or glassy, that replaces flammable liquid electrolytes in batteries to improve safety and energy density.

Conformality: The degree to which a deposited film uniformly covers complex substrate topographies, especially within high-aspect-ratio features.

Ionic conductivity: A measure of an electrolyte’s ability to transport ions under an electric field, typically expressed in siemens per centimetre (S cm⁻¹).

Glassy electrolyte: An amorphous solid ionic conductor, such as LiPON, characterised by isotropic ion transport and absence of grain boundaries.

References

1. Toward 3D Solid-State Batteries via Atomic Layer Deposition Approach. Frontiers in Energy Research (2018).
2. Advances in solid-state batteries fabrication strategies for their manufacture. Journal of Energy Storage (2025).
3. Conformal High-Aspect-Ratio Solid Electrolyte Thin Films for Li-Ion Batteries by Atomic Layer Deposition. ACS Applied Electronic Materials (2024).
4. An Environmental and Technical Evaluation of Vacuum-Based Thin Film Technologies: Lithium Niobate Coated Cathode Active Material for Use in All-Solid-State Battery Cells. Energies (2023).