Electron Interaction Phenomena in Solid Materials

Electrons penetrating solid materials undergo a range of interactions that govern many technological applications, from microscopy and spectroscopy to electronic devices and radiation therapies. Fundamental processes include elastic scattering, where electrons deviate from their original path without energy loss, and inelastic scattering, which transfers energy to collective excitations (plasmons, phonons) or single-particle excitations within the target. Such inelastic events lead to energy dissipation, secondary electron emission and characteristic X-ray generation, forming the basis of techniques such as scanning electron microscopy (SEM) and electron energy-loss spectroscopy (EELS). Many-body effects arising from electron–electron correlations and band-structure dependencies further modulate scattering cross sections and attenuation lengths in solids. The inelastic mean free path quantifies the average distance an electron travels before undergoing energy loss, critically determining depth resolution in surface analysis. Accurate models of electron transport, combining Monte Carlo simulations with dielectric-function approaches, have enabled quantitative predictions of energy-loss distributions and secondary emission yields. Advances in low-voltage operation and energy-filtered detection have expanded capabilities for ultra-shallow imaging and precise compositional mapping, while developments in nanostructure characterisation demand ever finer control of beam–sample interactions. A comprehensive understanding of these phenomena underpins progress in fields as diverse as semiconductor fabrication, photovoltaics, radiation dosimetry and materials analytics, offering pathways to optimise device performance and unravel nanoscale structures with unprecedented clarity.

Research from Nature Portfolio

No recent Nature Portfolio content available.

Electron Interaction Phenomena in Solid Materials publication trend

The graph below shows the total number of articles in electron interaction phenomena in solid materials across all publications each year (not limited to Nature Index journals).

Technical terms

Elastic scattering: Deflection of electrons by atomic nuclei or bound electrons without energy loss.

Inelastic mean free path (IMFP): Average distance an electron travels before losing energy through inelastic collisions.

Secondary electrons: Low-energy electrons emitted from a solid following inelastic scattering of primary electrons.

Elastic peak electron spectroscopy (EPES): Technique analysing the energy distribution of elastically scattered electrons to probe material composition and surface charging.

Electron energy-loss spectroscopy (EELS): Measurement of energy losses of transmitted electrons to reveal electronic structure, thickness and composition of thin films.

References

1. Energy Dissipation of Fast Electrons in Polymethylmethacrylate: Toward a Universal Curve for Electron-Beam Attenuation in Solids between ∼0 eV and Relativistic Energies. Physical Review Letters (2024).
2. Charge Phenomena in the Elastic Backscattering of Electrons from Insulating Polymers. Polymers (2024).
3. Electron Energy-Loss Spectroscopy Method for Thin-Film Thickness Calculations with a Low Incident Energy Electron Beam. Technologies (2024).
4. Imaging low-dimensional nanostructures by very low voltage scanning electron microscopy: ultra-shallow topography and depth-tunable material contrast. Scientific Reports (2019).