Multilayer Optics for X-ray and Extreme Ultraviolet Applications
Summary
Multilayer optics exploit the constructive interference of X-rays or extreme ultraviolet (EUV) radiation within a stack of alternating high- and low-refractive-index thin films. By precise control of individual layer thicknesses on the nanometre scale, these structures achieve high reflectivity at specific wavelengths via Bragg reflection under normal or grazing incidence. Innovations in material selection—such as Mo/Si, Mo/Be, Pt/C and Al/Zr—and in interface engineering, including barrier interlayers and graded designs, have extended bandwidth, enhanced damage resistance and reduced interfacial roughness. Aperiodic and depth-graded multilayers broaden angular and spectral response, while specialised deposition techniques ensure uniformity over large optics substrates. Such coatings underpin diverse applications: high-resolution spectrometers for laboratory plasma diagnosis, EUV lithography in semiconductor fabrication, space-borne X-ray astronomy, and synchrotron beamline metrology. Ongoing challenges centre on minimising interdiffusion, tailoring absorption edges and scaling up mirror dimensions for next-generation light sources. This field continues to bridge fundamental thin-film physics with rigorous industrial demands, emphasising both global technological impact and advanced scientific inquiry.
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Multilayer Optics for X-ray and Extreme Ultraviolet Applications publication trend
The graph below shows the total number of articles in multilayer optics for x-ray and extreme ultraviolet applications across all publications each year (not limited to Nature Index journals).
Technical terms
Multilayer mirror: A stack of alternating thin films engineered to reflect X-ray or EUV radiation via Bragg interference.
D-spacing: The periodic thickness of one high-index/low-index bilayer pair determining the Bragg peak wavelength.
Bragg reflection: Constructive interference of waves reflected from successive layers when 2d sin θ equals an integer multiple of the wavelength.
Grazing incidence: Measurement geometry where radiation strikes the mirror at a shallow angle to enhance reflectivity at shorter wavelengths.
Depth-graded multilayer: A non-periodic stack in which layer thicknesses vary through the coating to broaden spectral or angular bandwidth.
Normal incidence: Measurement geometry where radiation impinges perpendicular to the mirror surface, often used in EUV optics.
References
- Supermirror design for Hard X-Ray Telescopes on-board Hitomi (ASTRO-H). Journal of Astronomical Telescopes Instruments and Systems (2018).
- Broadband normal-incidence mirrors for a range of 111–138 Å based on an a-periodic Mo/Be multilayer structure. Optical Materials Express (2021).
- Depth-graded Mo/Si multilayer coatings for hard x-rays.. Optics Express (2019).
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