2D In2Se3 holds potential for 2D electronic devices, but its large-scale synthesis is challenging. The authors report the low-temperature deposition of wafer-scale non-ferroelectric κ-phase In2Se3 thin films and the fabrication of n-type transistor arrays, showing an average mobility of 39 cm2/Vs and on/off ratios of ≈108.
- Jaeyun Lee
- Yongwoo Lee
- Yong-Young Noh