Fano-resonant nanostructures have received interest in the sensing community due to the high local fields and narrow resonant linewidths. Here, the authors characterise subwavelength perturbations in a Fano-resonant dielectric metasurface using both a conventional spectral method and a Fourier scatterometry approach, demonstrating that perturbations induce pronounced directional scattering in Fourier space.
- Nick Feldman
- Arie J. den Boef
- A. Femius Koenderink
