This Primer explores metal–organic chemical vapour deposition (MOCVD) as a transformative technique for synthesizing wafer-scale 2D dichalcogenides. The MOCVD apparatus, the growth mechanism, process conditions, current applications across next-generation 3D integration, photonics, optoelectronics, flexible electronics and the future potential of MOCVD are discussed.
- Xiaotian Zhang
- Nicholas Trainor
- Joan M. Redwing